Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces.
نویسندگان
چکیده
3.2. Two-Photon Lithography (TPL) 919 4. Serial Writing with Charged Particles 920 4.1. Electron Beam Lithography 920 4.2. Ion Beam Lithography 920 4.3. Scanning Probe Resist Lithography 921 5. Microand Nanomachining 921 5.1. Focused Ion Beam 921 5.2. Scanning Probe Nanomachining 921 6. Direct Writing and Material Deposition 921 7. Moulding 922 7.1. Mould Fabrication 922 7.2. Demoulding: Mould Treatment 924 7.3. Embossing Thermoplastic Materials: Nanoimprint Lithography (NIL) 924
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ورودعنوان ژورنال:
- Chemical reviews
دوره 108 3 شماره
صفحات -
تاریخ انتشار 2008